EDC Gases CF4 Tetrafluoromethane Chemical Cool Gas R14
Main industrial emissions of tetrafluoromethane besides
hexafluoroethane are produced during production of aluminium using
Hall-Héroult process. CF4 also is produced as product of the
breakdown of more complex compounds such as halocarbons.
Due to its density, tetrafluoromethane can displace air, creating
an asphyxiation hazard in inadequately ventilated areas.
|(CF4) Carbon Tetrafluoride||%(V/V)≥||99.999|
|(H2O) Moisture||ppm (V/V)＜||1.0|
|(CO) Carbon monoxide||ppm(V/V)＜||0.1|
|(CO2) Carbon dioxide||Ppm((V/V)＜||1.0|
|(SF6) Sulfur Hexafluoride||ppm((V/V)＜||1.0|
|Acidity as HF||ppm((V/V)＜||0.1|
|Molar mess||88.0043 g/mol|
|Density||3.72 g/l, gas (15 °C)|
|Melting point||−183.6 °C (−298.5 °F; 89.5 K)|
|Boiling point||−127.8 °C (−198.0 °F; 145.3 K)|
|Solubility in water||0.005%V at 20 °C|
0.0038%V at 25 °C
|Solubility||soluble in benzene,chloroform|
|Vapor pressure||3.65 MPa at 15 °C|
106.5 kPa at −127 °C
1.Tetrafluoromethane is sometimes used as a low temperature
2.It is used in electronics microfabrication alone or in
combination with oxygen as a plasma etchant for
silicon,silicon dioxide,and silicon nitride.
3.It also has uses in neutron detectors.
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|CAS Register Number||75-73-0|
|DOT Classification||Nonflammable gas|
|DOT Label||Nonflammable gas|
|Transport Canada Classification||2.2|
|UN Number||UN 1982|
|Hazards||High Pressure and suffocation|
|Flammability Range (in air)||Nonflammable gas|