Purity 99.9% Halocarbon 116 Used As A Versatile Etchant In Semiconductor Manufacturing
First, the leakage C2F6 gases emergency treatment: wear
self-contained breathing apparatus, wearing uniforms. Cut off the
gas source. (Indoor) or strong ventilation (outdoor). The leaky
container can no longer be used and is subject to technical removal
to remove any remaining gas.
Second, the protective measures:
Respiratory protection: When the air concentration is high, you
should wear gas masks. In case of emergency rescue or evacuation,
it is advisable to wear self-contained breathing apparatus.
Eye protection: generally do not need special protection.
Body protection: wear overalls.
Hand protection: generally do not need special protection.
Other: Avoid high concentrations of inhalation.
Third, first aid measures
Inhalation: from the scene to the fresh air. Breathing difficulties
to oxygen. When breathing stops, take artificial respiration
immediately. Medical treatment.
Fire fighting method: cut off the gas source. Spray the water to
cool the container, if possible, move the container from the fire
to the open
1. Physical properties
530kg/500L refillable cylinder
20kg/40L refillable cylinder
Storage and Transportation
Use, store and transport below 45C. Store in cool and
well-ventilated areas. Keep away from fire, heat, sunlight and
flammable substances. Handle carefully when loading and unloading
to avoid damages to gas cylinders and accessories.
2. Typical technical data
|Vapor Residue, PPm||≤100|
|Appearance||Colorless, No turbid|
|Odor||No Strange Stench|
|Boiling Point, °C||-24.7|
|Critical Temperature, °C||113.5|
|Critical Pressure, Mpa||4.58|
|Specific Heat of Liquid, 30°C, [KJ/(kg°C)]||1.68|
|Multi - Functional Etching Technology||In The Production Of Semiconductor etching of metal|
|The Metal Substrate|
It can be used in the selective etching of metal silicon metal and
Under prolonged exposure to fire or intense heat the containers may
rupture violently and rocket.