Sign In | Join Free | My spintoband.com
China Wuhan Newradar Special Gas Co.,Ltd logo
Wuhan Newradar Special Gas Co.,Ltd
Wuhan Newradar Special Gas Co.,Ltd Your Reliable Special Gas & Equipment One-Stop Supplier
Site Member

8 Years

Home > Electronic Gases >

99.9% Purity Plus Specialty Gases Hexafluoro-2-Butyne For Semiconductor Industry

Wuhan Newradar Special Gas Co.,Ltd

99.9% Purity Plus Specialty Gases Hexafluoro-2-Butyne For Semiconductor Industry

  • 1
  • 2

Brand Name : NEWRADAR

Model Number : NO

Certification : ISO9001

Place of Origin : WUHAN

MOQ : 30KGS

Price : negotiation

Supply Ability : 30TON

Delivery Time : 5-10 DAYS

Packaging Details : 30lb - 926L Cylinder package

CAS No. : 685-63-2

Other Names : 1,1,2,3,4,4-hexafluorbuta-1,3-dieen

Hazard Class : 2.3

Purity : 99.9%

Application : Semiconductor industry

Beschrijving : Toxisch, ontvlambaar gas

Contact Now

Purity 99.9% Hexafluoro-2-butyne, Use in semiconductor industry.

Description:

Hexafluoro1,3‐butadine is a toxic, colorless, odorless, flammable liquefied compressed gas.

C4F6 gas as an etchant gas for a high aspect ratio contact hole etching can be a good

alternative to PFC gases.

hexafluoro-1,3-butadiene (C4F6) dry etching gas it has developed in Russia. C4F6 enables dry etching at a line width of as narrow as 90 nm or less. It is therefore indispensable for processing system LSIs and high-speed, large-capacity memory devices that are increasingly used in digital electric appliances and liquid crystal displays.

Fluorocarbon gases are widely used for processing silicon oxide film. Compared with octafluorocyclobutane (C4F8) currently used for processing at the line width of 130 nm, C4F6 has the following advantages:

1.Very low environmental load as it is decomposed in less than two days in the atmosphere (compared with 3,200 years for C4F8)

2.Therefore, useful as an alternative to perfluorocarbons with high global warming potential.

3.High aspect ratio, resulting in narrow and deep grooves (suitable for processing at very narrow line width).

4.High selectivity (ensures etching of silicon oxide film only; does not affect photoresist, silicon substrate or nitride film)

99.9% Purity Plus Specialty Gases Hexafluoro-2-Butyne For Semiconductor Industry

Fysische eigenschappen

Aggregatietoestand gasvormig
Dichtheid (bij 15°C) 1,427 g/cm³
Kookpunt ca. -130 °C
Smeltpunt ca. -130 °C
Dampdruk ca. 6 °C
Onoplosbaar in (bij 20°C) 178.800 Pa

Applications:

1. C4F6 can also be used as a kind of monomer.

2. It can use in the semiconductor processing materials operation


Product Tags:

electric gas

      

purity plus specialty gases

      
Wholesale 99.9% Purity Plus Specialty Gases Hexafluoro-2-Butyne For Semiconductor Industry from china suppliers

99.9% Purity Plus Specialty Gases Hexafluoro-2-Butyne For Semiconductor Industry Images

Inquiry Cart 0
Send your message to this supplier
 
*From:
*To: Wuhan Newradar Special Gas Co.,Ltd
*Subject:
*Message:
Characters Remaining: (0/3000)
 
Inquiry Cart 0