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Colorless C4F6 Electronic Gases 44L 99.95% Purity Cylinder Gas Hexafluoro-1,3-Butadiene

Wuhan Newradar Special Gas Co.,Ltd

Colorless C4F6 Electronic Gases 44L 99.95% Purity Cylinder Gas Hexafluoro-1,3-Butadiene

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Brand Name : Newradar Gas

Model Number : N/M

Certification : ISO9001

Place of Origin : China

MOQ : 60 KGS

Price : negotiation

Payment Terms : Western Union, L/C, T/T

Supply Ability : 50TON

Delivery Time : 7-10 DAYS

Packaging Details : 30lb - 926L Cylinder package

Appearance : gas

Color : colorless

Odor : odorless

Molecular Weight : 162.03 g/mol

Melting point / freezing point : -130 C

Boiling point / boiling range : -5.5 C

Flash point : ./.

Chemical name : Hexafluoro-1,3-butadiene

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C4F6 Etching Gas for Semiconductor Processing

Description:

C4F6 (Hexafluoro-1,3-butadiene) is used for dielectric etch applications. Hexafluoro-1,3-butadiene is a toxic, colorless, odorless, flammable liquefied compressed gas.

Package:44~49L cylinder, CGA350 SS valve

Filling content: 20kg/cyl

C4F6, is an environmentally friendly, high-performance semiconductor fabrication specialty gas that
provides high etch rates, good aspect ratio control and high selectivity to
photoresist in critical dielectric etch applications.

C4F6 gas improves dielectric etch process results in many key processing areas, including copper dual damascene applications and low K dielectric materials for 0.13 micron and beyond chip designs. Sifren 46 also provides environmental advantages in low global warming emissions and zero
ozone depletion potential.

Colorless C4F6 Electronic Gases 44L 99.95% Purity Cylinder Gas Hexafluoro-1,3-Butadiene

PHYSICAL AND CHEMICAL PROPERTIES

APPEARANCE AND ODOR GAS @ 25 °C AND 760 mmHg.
MELTING POINT: -132.1 °C
BOILING POINT 6 -7 °C @ 760 mmHg
VAPOR PRESSURE: 25 psia @ 20 °C
DENSITY: 1.553 g/mL @ -20 °C
REFRACTIVE INDEX: 1.378 @ -20 °C

STANDARD PACKAGE INFORMATION—ASIA AND NORTH AMERICA

Container Size 44L Steel 8L Steel
Fill Weights(kgs) 45 5
Valve ConnecƟon PneumaƟc DISS 724 Manual DISS 724
Cylinder Dimensions(in) 9x51 7x19

Applications:

1. Plasma Etching Processes for Sub-quarter Micron Devices.

2. Perfluorocarbon Alternative Gas Plasmas

3. Used in TFT-LCDs and photovoltaics.


Product Tags:

electric gas

      

purity plus specialty gases

      
Wholesale Colorless C4F6 Electronic Gases 44L 99.95% Purity Cylinder Gas Hexafluoro-1,3-Butadiene from china suppliers

Colorless C4F6 Electronic Gases 44L 99.95% Purity Cylinder Gas Hexafluoro-1,3-Butadiene Images

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