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Liquefied Colorless Electronic Gases , Halocarbon 116 Fluorocarbon Gas

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Wuhan Newradar Special Gas Co.,Ltd
City: Wuhan
Province/State: Hubei
Country/Region: China
Tel: 86-27-82653381-88189676
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Ms Vicky Liu

Liquefied Colorless Electronic Gases , Halocarbon 116 Fluorocarbon Gas

Brand Name : newradar
Model Number : N/A
Certification : ISO/DOT/GB
Place of Origin : China
MOQ : 1000 kilogram
Price : negotiation
Payment Terms : L/C, , T/T, Western Union, MoneyGram
Supply Ability : 3,00 ton per month
Delivery Time : 15-25 working days after received your payment
Packaging Details : standard export packing:each cylinder to be protected by two poly-nets,standing on wooden pallet wrapped by plastic film
CAS No. : 2551-62-4
EINECS No. : 200-939-8
Purity : 99.9%~99.999%
Other Names : Carbon hexafluoride, 1,1,1,2,2,2-Hexafluoroethane, Perfluoroethane, Ethforane, Halocarbon 116, PFC-116, CFC-116, R-116, Arcton 116, Halon 2600
Appearance : Colorless Liquefied Gas
UN NO. : 2193
Grade Standard : Electron Grade Industrial Grade
Synonyms : 1,1,1,2,2,2-Hexafluoroethane;C2F6;ethane,hexafluoro-;Ethylhexafluoride;f116;F-116;FC1160;Fluorocarbon 116
Application : Electronics equipment,transformer,refrigerating fluid
MF : C2F6
MW : 138.01
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Liquefied Colorless Electronic Gases , Halocarbon 116 Fluorocarbon Gas


Description:


Electronic Gases Hexafluoroethane is used as a versatile etchant in semiconductor manufacturing. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon. The primary aluminum and the semiconductor manufacturing industries are the major emitters of hexafluoroethane.


Hexafluoroethane is relatively inert. The mixture is nonflammable and nontoxic, though asphyxiation may occur because of displacement of oxygen. Under prolonged exposure to fire or intense heat the containers may rupture violently and rocket.


Hexafluoroethane is chemically inert in many situations, but can react violently with strong reducing agents such as the very active metals and the active metals. Can react with strong oxidizing agents or weaker oxidizing agents under extremes of temperature.


Vapors may cause dizziness or asphyxiation without warning. Vapors from liquefied gas are initially heavier than air and spread along ground. Contact with gas or liquefied gas may cause burns, severe injury and/or frostbite. Fire may produce irritating, corrosive and/or toxic gases.


Some may burn but none ignite readily. Containers may explode when heated. Ruptured cylinders may rocket.


Specifications:


1. Physical properties


Commodity

Hexafluoroethane

Molecular Formula

R116

CAS No

76-16-4

UN No.


2193

Hazardous Class

2.2

MF:

C2F6

Cylinder Capacity

40L, 500L

Filling Weight

530kg/500L refillable cylinder

20kg/40L refillable cylinder

Storage and Transportation

Use, store and transport below 45C. Store in cool and well-ventilated areas. Keep away from fire, heat, sunlight and flammable substances. Handle carefully when loading and unloading to avoid damages to gas cylinders and accessories.


2. Typical technical data


Purity, %≥99.8
Moisture, PPm≤10
Acidity, PPm≤1
Vapor Residue, PPm≤100
AppearanceColorless, No turbid
OdorNo Strange Stench

Molecular Weight66.1
Boiling Point, °C-24.7
Critical Temperature, °C113.5
Critical Pressure, Mpa4.58
Specific Heat of Liquid, 30°C, [KJ/(kg°C)]1.68
ODP0
GWP0.014

Applications:


Multi - Functional Etching TechnologyIn The Production Of Semiconductor etching of metal
The Metal Substrate

It can be used in the selective etching of metal silicon metal and metal oxide.

Under prolonged exposure to fire or intense heat the containers may rupture violently and rocket.



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