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Electron Gas Carbon Tetrafluoride Tetrafluoromethane CAS 7440-59-7

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Electron Gas Carbon Tetrafluoride Tetrafluoromethane CAS 7440-59-7

Brand Name : OEM / NRD
Model Number : N/A
Certification : ISO/DOT/GB
Place of Origin : China
MOQ : 1~10cylinders
Price : negotiation
Payment Terms : T/T or L/C, Western Union
Supply Ability : 500000 Cubic Meters per Month
Delivery Time : 10 working days after received your payment
Packaging Details : Packed in10L-50L cylinder or customised cylinder by customer
Product Name : Tetrafluoromethane, carbon tetrafluoride
Purity : 99.999%
CAS No : 7440-59-7
EINECS No. : 231-110-9
MF : CF4
Application : For electron industry
Grade : Electron-grade
UN Number : 1982
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Electron Gas Carbon Tetrafluoride Tetrafluoromethane CAS 7440-59-7


Tetrafluoromethane, also known as carbon tetrafluoride, is the simplest fluorocarbon(CF4) . It has

a very high bond strength due to the nature of the carbon-fluorine bond.

It can also be classified as a haloalkane or halomethane.Because of the multiple carbon–fluorine bonds, and the highest electronegativity of fluorine, the carbon in tetrafluoromethane has a significant positive partial charge which strengthens and shortens the four carbon–fluorine bonds by providing additional ionic character. Tetrafluoromethane is a potent greenhouse gas.


(CF4) Carbon Tetrafluoride%(V/V)≥99.999
(N2) Nitrogenppm(V/V)<4.0
(O2) Oxygenppm(V/V)<1.0
(H2O) Moistureppm (V/V)<1.0
(CO) Carbon monoxideppm(V/V)<0.1
(CO2) Carbon dioxidePpm((V/V)<1.0
(SF6) Sulfur Hexafluorideppm((V/V)<1.0
Acidity as HFppm((V/V)<0.1

Chemical formularCF4
Molar mess88.0043 g/mol
AppearanceColorless gas
Density3.72 g/l, gas (15 °C)
Melting point−183.6 °C (−298.5 °F; 89.5 K)
Boiling point−127.8 °C (−198.0 °F; 145.3 K)
Solubility in water0.005%V at 20 °C
0.0038%V at 25 °C
Solubilitysoluble in benzene,chloroform
Vapor pressure3.65 MPa at 15 °C
106.5 kPa at −127 °C


1.Tetrafluoromethane is sometimes used as a low temperature refrigerant.

2.It is used in electronics microfabrication alone or in combination with oxygen as a plasma etchant for

silicon,silicon dioxide,and silicon nitride.

3.It also has uses in neutron detectors.

Our carbon tetrafluoride supplying enough which determines our delivery on time or quickly and high & strictly quality control are widely praised by customers in the past cooperation. Packaging can be customized by customer's demands.


CAS Register Number75-73-0
DOT ClassificationNonflammable gas
DOT LabelNonflammable gas
Transport Canada Classification2.2
UN NumberUN 1982
HazardsHigh Pressure and suffocation
Toxicity (TLV)Asphyxiant
Flammability Range (in air)Nonflammable gas

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